Electrostatic Chuck Accessories
Overview. For proper operation and continued reliability, the high
voltage outputs of
any electrostatic chuck power supply must be electrically isolated from extremely
DC bias voltages, high energy RF fields or other sources of potential damage.
electrostatic chuck application for a semiconductor plasma process is shown
below. All of
the components are required for proper clamping operation and protection
of any of the
EPS series power supplies.
EPS200 - Typical Application
It is highly recommended that only accessories manufactured, or specifically
Gripping Power, Inc. should be used with the EPS series power supplies when
an electrostatic chuck application for high energy processes. Gripping Power,
provide high-voltage interconnect cables, RF decouplers and other accessories
any specific need. Our engineering staff and technical representitives are
assist in solving the most complex electrostatic chuck problems.