Custom Electrostatic Chuck Applications

  • Improved thermal transfer performance; aluminum and ceramic hybrid design.
  • Enables faster RIE and ICP etch rates, resulting in improved tool throughput.
  • Precision manufactured - Flatness £3 mm and surface roughness Ra £ 0.25 mm.
  • Helium leak rate £ 0.15 sccm with a backside gas pressure of 10 Torr.
  • Nominal operation from 500 to 2,500 VDC; current draw 10uA typical.
  • Continuous operation from -50°C to +200°C.
  • Wear resistant ceramic finish survives high-energy plasma chemistries.
  • Custom, unique, low-volume ESC applications are our speciality.
  • Made in the USA; shorter lead times for standard products and new designs.

Overview, Applications and FAQ


Technical Specifications

Typical Application

Ordering Information

[Home] [Mission] [Products] [Services] [Profile]
[Contacts] [Employment] [Guestbook] [Links]

Copyright ©2003 Gripping Power, Inc.
All rights reserved. Last Update: 25 Jul 2004 1300