EPS200 Electrostatic Chuck Power Supply

  • True floating 1kV or 2.5kV DC bipolar output (center tap optional)
  • Compatible with Dorsey Gage, Invax and TOTO electrostatic chucks.
  • Proven reliability in RIE, PECVD, and PVD processes
  • 10 user definable programs, each with 32 steps
  • Powerful command language allows complex chuck/dechuck algorithms
  • One local and three remote operating modes
  • Back-lit, 4 line LCD displays voltage, current and program status

EPS200 - LCD Display and Operator Controls

  • RS-232 serial interface
  • Remote digital on/off control
  • Remote analog setpoint and monitoring
  • Mounts in a standard 9.5" equipment half-rack
  • Dimensions: 9.5" x 3.5" x 10"
  • AC input power: 90-264 VAC, 47-63 Hz
  • Optional DC input power: 24 VDC, ±15 VDC

EPS200 - HV Output and Control Interface

EPS200 Features

EPS200 Technical Specifications

EPS200 Interface Specifications

EPS200 Typical Application
EPS200 RS-232 Operation

EPS200 Programming Example

EPS200 Ordering Information

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Copyright ©2002 Gripping Power, Inc.
All rights reserved. Last Update: 02 Jan 2003 1300

Email: sales@grippingpower.com