EPS120 Electrostatic Chuck Power Supply

  • True floating 1kV DC bipolar output
  • Compatible with Dorsey Gage, Invax and TOTO electrostatic chucks.
  • Proven reliability in RIE, PECVD, and PVD processes
  • Manual setpoint and remote analog setpoint and monitoring
  • Remote digital HV on/off control

    EPS120 - LCD Display and Operator Controls

  • Preprogrammed chuck/dechuck algorithm
  • Back-lit LCD displays voltage and current
  • Mounts in a standard 9.5" equipment half-rack
  • Input power: 90-264 VAC, 47-63 Hz
  • Optional DC input power: 24 VDC, ±15 VDC

EPS120 Interface Specifications

EPS120 Ordering Information

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Copyright ©2002 Gripping Power, Inc.
All rights reserved. Last Update: 02 Jan 2003 1300

Email: sales@grippingpower.com