Electrostatic Chuck General Specifications:

  • Improved thermal transfer performance; aluminum and ceramic hybrid design.
  • Enables faster RIE and ICP etch rates, resulting in improved tool throughput.
  • Precision manufactured - Flatness £3 mm and surface roughness Ra £ 0.25 mm.
  • Helium leak rate £ 0.15 sccm with a backside gas pressure of 10 Torr.
  • Nominal operation from 500 to 2,500 VDC; current draw 10uA typical.
  • Continuous operation from -50°C to +200°C.
  • Wear resistant ceramic finish survives high-energy plasma chemistries.
  • Custom, unique, low-volume ESC applications are our speciality.
  • Made in the USA; shorter lead times for standard products and new designs.

Overview, Applications and FAQ

Features

Technical Specifications

Typical Application

Ordering Information



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All rights reserved. Last Update: 24 Apr 2005 1300

Email: johnk@grippingpower.com