EPS300 Embedded Electrostatic Chuck Power Supply

EPS300 General Specifications

  • True floating, 1kV or 2kV, bipolar output
  • Proven reliability in 300mm semiconductor processing applications
  • RS-232 serial interface
  • Remote digital on/off control
  • Remote analog monitoring of load voltage and current
  • Two user-defined programmable digital outputs
  • Five LED status indicators
EPS300 Interface Connectors
  • Powerful command language allows complex chuck/dechuck algorithms
  • Programming language is backwardly compatible with the EPS200
  • 10 user definable programs, each with 32 steps
  • Supports MultiMode ESC technology
  • Meets SEMI S2 requirements
  • Input power: ±15 VDC at 800mA or +24 VDC at 1A
  • Dimensions: 2.50" x 6.00" x 9.90" (H x W x D)
Features

Technical Specifications

Interface Specifications

Typical Application
RS-232 Operation

Programming Examples

Mounting Dimensions

Ordering Information

 MultiMode ESC is a registered trademark of Gripping Power, Inc.


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All rights reserved. Last Update: 01 Aug 2004 1300

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